دورية أكاديمية
Sensitivity Enhancement of Thermal Piezoresistive Resonant MEMS Sensors Using Mechanical Coupling and DC Tuning
| العنوان: | Sensitivity Enhancement of Thermal Piezoresistive Resonant MEMS Sensors Using Mechanical Coupling and DC Tuning |
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| المؤلفون: | Bhattacharya, S., Satija, J., Trivedi, S., Li, S. |
| المصدر: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 31(5):760-770 Oct, 2022 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 10577157 19410158 |
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| DOI: | 10.1109/JMEMS.2022.3188267 |