دورية أكاديمية
A silicon-etched probe for 3-D coordinate measurements with an uncertainty below 0.1 /spl mu/m
العنوان: | A silicon-etched probe for 3-D coordinate measurements with an uncertainty below 0.1 /spl mu/m |
---|---|
المؤلفون: | Haitjema, H., Pril, W., Schellekens, P.H.J. |
المصدر: | IEEE Transactions on Instrumentation and Measurement IEEE Trans. Instrum. Meas. Instrumentation and Measurement, IEEE Transactions on. 50(6):1519-1523 Dec, 2001 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 00189456 15579662 |
---|---|
DOI: | 10.1109/19.982938 |