دورية أكاديمية
A silicon-etched probe for 3-D coordinate measurements with an uncertainty below 0.1 /spl mu/m
| العنوان: | A silicon-etched probe for 3-D coordinate measurements with an uncertainty below 0.1 /spl mu/m |
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| المؤلفون: | Haitjema, H., Pril, W., Schellekens, P.H.J. |
| المصدر: | IEEE Transactions on Instrumentation and Measurement IEEE Trans. Instrum. Meas. Instrumentation and Measurement, IEEE Transactions on. 50(6):1519-1523 Dec, 2001 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 00189456 15579662 |
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| DOI: | 10.1109/19.982938 |