مؤتمر
Analysis of multilayer structure for reflection of extreme ultra-violet wavelength
| العنوان: | Analysis of multilayer structure for reflection of extreme ultra-violet wavelength |
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| المؤلفون: | Seung Yoon Lee, Sung Min Hur, Hyung Joon Kim, Dong Hyun Lee, Young Tae Lee, In Yong Kang, Yong-Chae Chung, Moonsuk Yi, Cheol Kyu Bok, Jinho Ahn |
| المصدر: | Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Microprocesses and nanotechnology Microprocesses and Nanotechnology Conference, 2001 International. :84-85 2001 |
| Relation: | Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 4891140178 9784891140175 |
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| DOI: | 10.1109/IMNC.2001.984090 |