مؤتمر
Sub-nanometer resolution ultrasonic motor for 300 mm wafer lithography precision stage
| العنوان: | Sub-nanometer resolution ultrasonic motor for 300 mm wafer lithography precision stage |
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| المؤلفون: | Egashira, Y., Kosaka, K., Takada, S., Iwabuchi, T., Kosaka, T., Baba, T., Harada, T., Nagamoto, K., Nakada, A., Kubota, H. |
| المصدر: | Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Microprocesses and nanotechnology Microprocesses and Nanotechnology Conference, 2001 International. :252-253 2001 |
| Relation: | Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 4891140178 9784891140175 |
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| DOI: | 10.1109/IMNC.2001.984184 |