On the Influence of Metal Chucks in Wideband On-Wafer Measurements

التفاصيل البيبلوغرافية
العنوان: On the Influence of Metal Chucks in Wideband On-Wafer Measurements
المؤلفون: Phung, Gia Ngoc, ArZ, Uwe
المصدر: 2022 98th ARFTG Microwave Measurement Conference (ARFTG) ARFTG Microwave Measurement Conference (ARFTG), 2022 98th. :1-4 Jan, 2022
Relation: 2022 98th ARFTG Microwave Measurement Conference (ARFTG)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781665406628
DOI:10.1109/ARFTG52954.2022.9844119