مؤتمر
The electrical characteristics analysis of SiO/sub x/N/sub y/ ARC for sub-0.17/sup /spl middot// /spl middot/Gigabit DRAM
| العنوان: | The electrical characteristics analysis of SiO/sub x/N/sub y/ ARC for sub-0.17/sup /spl middot// /spl middot/Gigabit DRAM |
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| المؤلفون: | Chi-Hoon Lee, Nak-Jin Son, Sun-Cheol Hong, Seung-Moo Lee, Dong-Gun Park, Won-Hee Jang, Tae-Hyun An, Wonshik Lee |
| المصدر: | 2001 International Semiconductor Device Research Symposium. Symposium Proceedings (Cat. No.01EX497) Semiconductor device research Semiconductor Device Research Symposium, 2001 International. :38-41 2001 |
| Relation: | 2001 International Semiconductor Device Research Symposium. Symposium Proceedings |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780374320 9780780374324 |
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| DOI: | 10.1109/ISDRS.2001.984433 |