مؤتمر
Process Window Integration Rule Check for Beol in Advanced Tech Node
| العنوان: | Process Window Integration Rule Check for Beol in Advanced Tech Node |
|---|---|
| المؤلفون: | Wang, Xiaoyan, Yang, Qing, Ren, Honghong, Chen, Xuanbo, Liu, Qingwei |
| المصدر: | 2022 China Semiconductor Technology International Conference (CSTIC) Semiconductor Technology International Conference (CSTIC), 2022 China. :1-4 Jun, 2022 |
| Relation: | 2022 China Semiconductor Technology International Conference (CSTIC) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
| ردمك: | 9781665497589 9781665497572 |
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| DOI: | 10.1109/CSTIC55103.2022.9856754 |