مؤتمر
Research on the oxidation behavior of Titanium nitride thin films and resistance simulation
| العنوان: | Research on the oxidation behavior of Titanium nitride thin films and resistance simulation |
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| المؤلفون: | Zhang, Xiaotong, Zeng, Zhaoqin, Cao, Yanpeng, Zhang, Yanyan, Bao, Yu, Zhou, Haifeng, Fang, Jingxun, Zhang, Yu |
| المصدر: | 2022 China Semiconductor Technology International Conference (CSTIC) Semiconductor Technology International Conference (CSTIC), 2022 China. :1-4 Jun, 2022 |
| Relation: | 2022 China Semiconductor Technology International Conference (CSTIC) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
| ردمك: | 9781665497589 9781665497572 |
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| DOI: | 10.1109/CSTIC55103.2022.9856880 |