Analysis of Influence to Gate Stack of Eeprom Using CL Doped Re-Oxidation

التفاصيل البيبلوغرافية
العنوان: Analysis of Influence to Gate Stack of Eeprom Using CL Doped Re-Oxidation
المؤلفون: Zhang, Hong, Huang, Po-Yu
المصدر: 2022 China Semiconductor Technology International Conference (CSTIC) Semiconductor Technology International Conference (CSTIC), 2022 China. :1-4 Jun, 2022
Relation: 2022 China Semiconductor Technology International Conference (CSTIC)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781665497589
9781665497572
DOI:10.1109/CSTIC55103.2022.9856918