Evaluation of BEOL scaling boosters for sub-2nm using enhanced-RO analysis

التفاصيل البيبلوغرافية
العنوان: Evaluation of BEOL scaling boosters for sub-2nm using enhanced-RO analysis
المؤلفون: Farokhnejad, Anita, Esposto, Simone, Ciofi, Ivan, Zografos, Odysseas, Weckx, Pieter, Ryckaert, Julien, Schuddinck, Pieter, Xiang, Yang, Tokei, Zsolt
المصدر: 2022 IEEE International Interconnect Technology Conference (IITC) Interconnect Technology Conference (IITC), 2022 IEEE International. :136-138 Jun, 2022
Relation: 2022 IEEE International Interconnect Technology Conference (IITC)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781665486460
تدمد:23806338
DOI:10.1109/IITC52079.2022.9881286