التفاصيل البيبلوغرافية
العنوان: |
Evaluation of BEOL scaling boosters for sub-2nm using enhanced-RO analysis |
المؤلفون: |
Farokhnejad, Anita, Esposto, Simone, Ciofi, Ivan, Zografos, Odysseas, Weckx, Pieter, Ryckaert, Julien, Schuddinck, Pieter, Xiang, Yang, Tokei, Zsolt |
المصدر: |
2022 IEEE International Interconnect Technology Conference (IITC) Interconnect Technology Conference (IITC), 2022 IEEE International. :136-138 Jun, 2022 |
Relation: |
2022 IEEE International Interconnect Technology Conference (IITC) |
قاعدة البيانات: |
IEEE Xplore Digital Library |