Reliability benchmark of various via prefill metals

التفاصيل البيبلوغرافية
العنوان: Reliability benchmark of various via prefill metals
المؤلفون: Pedreira, O. Varela, Simons, V., van der Veen, M.H, Ciofi, I., Park, S., Tokei, Zs., Croes, K., Pethe, S., Lei, W., Hwang, S., Wu, Z., Chen, F., Jansen, A., Machillot, J., Cockburn, A.
المصدر: 2022 IEEE International Interconnect Technology Conference (IITC) Interconnect Technology Conference (IITC), 2022 IEEE International. :31-33 Jun, 2022
Relation: 2022 IEEE International Interconnect Technology Conference (IITC)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781665486460
تدمد:23806338
DOI:10.1109/IITC52079.2022.9881318