التفاصيل البيبلوغرافية
| العنوان: |
Design of Precision Positioning Stage Driven by Voice Coil Motor with Integrated Active Eddy Current Damper |
| المؤلفون: |
Sang, Na, Zhang, Chi, Huang, Xiaolu, Yu, Hongtao, Wang, Weizhen, Yang, Guilin |
| المصدر: |
2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2022 IEEE International Conference on. :166-171 Aug, 2022 |
| Relation: |
2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
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