BEoL integrated hafnium zirconium oxide varactors for tunable mmWave applications

التفاصيل البيبلوغرافية
العنوان: BEoL integrated hafnium zirconium oxide varactors for tunable mmWave applications
المؤلفون: Abdulazhanov, Sukhrob, Huynh, Dang Khoa, Le, Quang Huy, Lehninger, David, Kampfe, Thomas, Gerlach, Gerald
المصدر: ESSDERC 2022 - IEEE 52nd European Solid-State Device Research Conference (ESSDERC) Solid-State Device Research Conference (ESSDERC), ESSDERC 2022 - IEEE 52nd European. :253-256 Sep, 2022
Relation: ESSDERC 2022 - IEEE 52nd European Solid-State Device Research Conference (ESSDERC)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781665484978
DOI:10.1109/ESSDERC55479.2022.9947182