التفاصيل البيبلوغرافية
| العنوان: |
Parameter Extraction of Thin-Film Scandium-Doped Aluminum Nitride in Piezoelectric Over Silicon-On-Nothing Platform |
| المؤلفون: |
Ghosh, Sagnik, Ramegowda, Prakasha, Ng, Eldwin, Ali, Zishan, Goh, Duan Jian, Sharma, Jaibir, Wong, Han Xuan, Lee, Joshua |
| المصدر: |
2022 IEEE International Ultrasonics Symposium (IUS) Ultrasonics Symposium (IUS), 2022 IEEE International. :1-4 Oct, 2022 |
| Relation: |
2022 IEEE International Ultrasonics Symposium (IUS) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
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