Pseudo-breakdown events induced by biased-thermal-stressing of intra-level Cu interconnects-reliability and performance impact

التفاصيل البيبلوغرافية
العنوان: Pseudo-breakdown events induced by biased-thermal-stressing of intra-level Cu interconnects-reliability and performance impact
المؤلفون: Song, W.S., Kim, T.J., Lee, D.H., Kim, T.K., Lee, C.S., Kim, J.W., Kim, S.Y., Jeong, D.K., Park, K.C., Wee, Y.J., Suh, B.S., Choi, S.M., Kang, H.-K., Suh, K.P., Kim, S.U.
المصدر: 2002 IEEE International Reliability Physics Symposium. Proceedings. 40th Annual (Cat. No.02CH37320) Reliability physics symposium Reliability Physics Symposium Proceedings, 2002. 40th Annual. :305-311 2002
Relation: 2002 IEEE International Reliability Physics Symposium Proceedings. 40th Annual
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780373529
9780780373525
DOI:10.1109/RELPHY.2002.996653