مؤتمر
Vertical Electrostatic MEMS Aligner with Integrated Silicon Nitride Optical Waveguides
| العنوان: | Vertical Electrostatic MEMS Aligner with Integrated Silicon Nitride Optical Waveguides |
|---|---|
| المؤلفون: | Nabavi, Seyedfakhreddin, Menard, Michael, Nabki, Frederic |
| المصدر: | 2022 IEEE Sensors Sensors, 2022 IEEE. :1-4 Oct, 2022 |
| Relation: | 2022 IEEE Sensors |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781665484640 |
|---|---|
| تدمد: | 21689229 |
| DOI: | 10.1109/SENSORS52175.2022.9967301 |