التفاصيل البيبلوغرافية
| العنوان: |
Improved Processing Window of Contact Hole with Directed Self-Assembly of Block Copolymer Blends |
| المؤلفون: |
Wu, Zhiyong, Dong, Qingshu, Xu, Xingran, Li, Zili, Liu, Yadong, Ji, Shengxiang, Li, Weihua, Manhua, Shen, Xiong, Shisheng |
| المصدر: |
2022 International Workshop on Advanced Patterning Solutions (IWAPS) Advanced Patterning Solutions (IWAPS), 2022 International Workshop on. :1-4 Oct, 2022 |
| Relation: |
2022 International Workshop on Advanced Patterning Solutions (IWAPS) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
