دورية أكاديمية
A Fully Integrated, MEMS Based, Micro-Scale Printer for Cryogenic Thin Film Structures
العنوان: | A Fully Integrated, MEMS Based, Micro-Scale Printer for Cryogenic Thin Film Structures |
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المؤلفون: | Lally, R., Imboden, M., Stange, A., Barrett, L.K., Perez-Morelo, D.J., Bishop, D.J. |
المصدر: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 32(1):126-135 Feb, 2023 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 10577157 19410158 |
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DOI: | 10.1109/JMEMS.2022.3224476 |