A Fully Integrated, MEMS Based, Micro-Scale Printer for Cryogenic Thin Film Structures

التفاصيل البيبلوغرافية
العنوان:	A Fully Integrated, MEMS Based, Micro-Scale Printer for Cryogenic Thin Film Structures
المؤلفون:	Lally, R., Imboden, M., Stange, A., Barrett, L.K., Perez-Morelo, D.J., Bishop, D.J.
المصدر:	Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 32(1):126-135 Feb, 2023
قاعدة البيانات:	IEEE Xplore Digital Library

الوصف
تدمد:	10577157 19410158
DOI:	10.1109/JMEMS.2022.3224476