دورية أكاديمية
Remote Actuation of Silicon Nitride Nanomechanical Resonators Using On-Chip Substrate Capacitors
| العنوان: | Remote Actuation of Silicon Nitride Nanomechanical Resonators Using On-Chip Substrate Capacitors |
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| المؤلفون: | Mu, G., Snell, N., Zhang, C., Xie, X., Tahvildari, R., Weck, A., Godin, M., St-Gelais, R. |
| المصدر: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 32(1):29-36 Feb, 2023 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 10577157 19410158 |
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| DOI: | 10.1109/JMEMS.2022.3228188 |