دورية أكاديمية
Growth of cubic silicon carbide on oxide using polysilicon as a seed layer for micro-electro-mechanical machine applications
| العنوان: | Growth of cubic silicon carbide on oxide using polysilicon as a seed layer for micro-electro-mechanical machine applications |
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| المؤلفون: | Frewin, C.L., Locke, C., Wang, J., Spagnol, P., Saddow, S.E. |
| المصدر: | In Journal of Crystal Growth 2009 311(17):4179-4182 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 00220248 |
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| DOI: | 10.1016/j.jcrysgro.2009.06.037 |