دورية أكاديمية

Investigation of off-cut angle of sapphire for epitaxial lateral overgrowth of AlN and fabrication of high-quality AlN template

التفاصيل البيبلوغرافية
العنوان: Investigation of off-cut angle of sapphire for epitaxial lateral overgrowth of AlN and fabrication of high-quality AlN template
المؤلفون: Okada, Narihito, Saito, Takahiro, Fujikawa, Sachie, Maeda, Noritoshi, Jo, Masafumi, Hirayama, Hideki, Tadatomo, Kazuyuki
المصدر: In Journal of Crystal Growth 15 June 2022 588
قاعدة البيانات: ScienceDirect
الوصف
تدمد:00220248
DOI:10.1016/j.jcrysgro.2022.126640