دورية أكاديمية
A CFD study of the gas reaction path in growth of InN films in metal–organic chemical vapor deposition
العنوان: | A CFD study of the gas reaction path in growth of InN films in metal–organic chemical vapor deposition |
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المؤلفون: | Su, Peng, Zheng, Guangyu, Zhang, Hong, Sun, Yukang, Zuo, Ran, Liu, Lijun |
المصدر: | In Journal of Crystal Growth 15 January 2024 626 |
قاعدة البيانات: | ScienceDirect |
تدمد: | 00220248 |
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DOI: | 10.1016/j.jcrysgro.2023.127464 |