دورية أكاديمية
Effect of carbon concentration on optical and structural properties in the transition from Silicon Rich Oxide to SiCxOy films formation
العنوان: | Effect of carbon concentration on optical and structural properties in the transition from Silicon Rich Oxide to SiCxOy films formation |
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المؤلفون: | Coyopol, A., Vásquez-Agustín, M.A., García-Salgado, G., López-Ramírez, R., Romano-Trujillo, R., Jiménez-Vivanco, M.R., Rosendo, E., Morales, C., Galeazzi, R., Pérez-García, S.A. |
المصدر: | In Journal of Luminescence June 2022 246 |
قاعدة البيانات: | ScienceDirect |
تدمد: | 00222313 |
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DOI: | 10.1016/j.jlumin.2022.118851 |