دورية أكاديمية
Impact of etch angles on cell characteristics in 3D NAND flash memory
| العنوان: | Impact of etch angles on cell characteristics in 3D NAND flash memory |
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| المؤلفون: | Oh, Young-Taek, Kim, Kyu-Beom, Shin, Sang-Hoon, Sim, Hahng, Van Toan, Nguyen, Ono, Takahito, Song, Yun-Heub |
| المصدر: | In Microelectronics Journal September 2018 79:1-6 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 18792391 |
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| DOI: | 10.1016/j.mejo.2018.06.009 |