دورية أكاديمية
Charging induced damage by photoconduction through thick inter metal dielectrics
العنوان: | Charging induced damage by photoconduction through thick inter metal dielectrics |
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المؤلفون: | Ackaert, Jan, Bessemans, Klara, De Backer, Eddy |
المصدر: | In Microelectronics Reliability 2003 43(9):1525-1529 |
قاعدة البيانات: | ScienceDirect |
تدمد: | 00262714 |
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DOI: | 10.1016/S0026-2714(03)00270-1 |