دورية أكاديمية
Effects of gamma radiation on suspended silicon nanogauges bridge used for MEMS transduction
| العنوان: | Effects of gamma radiation on suspended silicon nanogauges bridge used for MEMS transduction |
|---|---|
| المؤلفون: | Janioud, P., Poulain, C., Koumela, A., Armani, J.M., Dupret, A., Rey, P., Berthelot, A., Jourdan, G., Morfouli, P. |
| المصدر: | In Microelectronics Reliability November 2020 114 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 00262714 |
|---|---|
| DOI: | 10.1016/j.microrel.2020.113736 |