دورية أكاديمية
Frequency dependence of the lifetime of a surface micromachined microengine driving a load
العنوان: | Frequency dependence of the lifetime of a surface micromachined microengine driving a load |
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المؤلفون: | Tanner, Danelle M *, Miller, William M, Peterson, Ken A, Dugger, Michael T, Eaton, William P, Irwin, Lloyd W, Senft, Donna C, Smith, Norman F, Tangyunyong, Paiboon, Miller, Samuel L |
المصدر: | In Microelectronics Reliability 1999 39(3):401-414 |
قاعدة البيانات: | ScienceDirect |
تدمد: | 00262714 |
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DOI: | 10.1016/S0026-2714(98)00248-0 |