دورية أكاديمية
Strain engineering of ultra-thin silicon-on-insulator structures using through-buried-oxide ion implantation and crystallization
| العنوان: | Strain engineering of ultra-thin silicon-on-insulator structures using through-buried-oxide ion implantation and crystallization |
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| المؤلفون: | Ding, Yinjie, Cheng, Ran, Zhou, Qian, Du, Anyan, Daval, Nicolas, Nguyen, Bich-Yen, Yeo, Yee-Chia |
| المصدر: | In Solid State Electronics May 2013 83:37-41 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 00381101 |
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| DOI: | 10.1016/j.sse.2013.01.027 |