دورية أكاديمية
Strain engineering of ultra-thin silicon-on-insulator structures using through-buried-oxide ion implantation and crystallization
العنوان: | Strain engineering of ultra-thin silicon-on-insulator structures using through-buried-oxide ion implantation and crystallization |
---|---|
المؤلفون: | Ding, Yinjie, Cheng, Ran, Zhou, Qian, Du, Anyan, Daval, Nicolas, Nguyen, Bich-Yen, Yeo, Yee-Chia |
المصدر: | In Solid State Electronics May 2013 83:37-41 |
قاعدة البيانات: | ScienceDirect |
تدمد: | 00381101 |
---|---|
DOI: | 10.1016/j.sse.2013.01.027 |