دورية أكاديمية
Modeled optical properties of SiGe and Si layers compared to spectroscopic ellipsometry measurements
العنوان: | Modeled optical properties of SiGe and Si layers compared to spectroscopic ellipsometry measurements |
---|---|
المؤلفون: | Kriso, C., Triozon, F., Delerue, C., Schneider, L., Abbate, F., Nolot, E., Rideau, D., Niquet, Y.-M., Mugny, G., Tavernier, C. |
المصدر: | In Solid State Electronics March 2017 129:93-96 |
قاعدة البيانات: | ScienceDirect |
تدمد: | 00381101 |
---|---|
DOI: | 10.1016/j.sse.2016.12.011 |