دورية أكاديمية
Sensitivity enhancement in OCD metrology by optimizing azimuth angle based on the RCWA simulation
| العنوان: | Sensitivity enhancement in OCD metrology by optimizing azimuth angle based on the RCWA simulation |
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| المؤلفون: | Choi, Hyunsuk, Lee, Kwangseok, Doh, Jiseong, Jeong, Jaehoon, Kwag, Taeshin, Kim, Minseok, Kim, Yeonjeong, Kim, Jongchul, Yoo, Hyung Keun, Kim, Dae Sin |
| المصدر: | In Solid State Electronics February 2023 200 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 00381101 |
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| DOI: | 10.1016/j.sse.2022.108574 |