دورية أكاديمية
Impact of work function metal stacks on the performance and reliability of multi-Vth RMG CMOS technology
| العنوان: | Impact of work function metal stacks on the performance and reliability of multi-Vth RMG CMOS technology |
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| المؤلفون: | Franco, J., Arimura, H., Brus, S., Dentoni Litta, E., Croes, K., Horiguchi, N., Kaczer, B. |
| المصدر: | In Solid State Electronics June 2024 216 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 00381101 |
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| DOI: | 10.1016/j.sse.2024.108929 |