دورية أكاديمية
On monitoring of gas leak in the plasma vacuum process with optical emission spectroscopy
| العنوان: | On monitoring of gas leak in the plasma vacuum process with optical emission spectroscopy |
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| المؤلفون: | Pyun, S.C., Kwon, J.H., You, S.J., Seong, D.J., Kim, J.H., Shin, Y.H., Shin, J.S. |
| المصدر: | In Thin Solid Films 2010 518(22):6658-6662 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 00406090 |
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| DOI: | 10.1016/j.tsf.2010.01.050 |