دورية أكاديمية
Pulsed-DC sputtering of molybdenum bottom electrode and piezoelectric aluminum nitride films for bulk acoustic resonator applications
| العنوان: | Pulsed-DC sputtering of molybdenum bottom electrode and piezoelectric aluminum nitride films for bulk acoustic resonator applications |
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| المؤلفون: | Cherng, J.S., Chen, T.Y., Lin, C.M. |
| المصدر: | In Thin Solid Films 2011 519(20):6797-6800 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 00406090 |
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| DOI: | 10.1016/j.tsf.2011.01.391 |