دورية أكاديمية
Ion assisted near-complete filling of high aspect ratio trenches for 3-D neutron detectors
| العنوان: | Ion assisted near-complete filling of high aspect ratio trenches for 3-D neutron detectors |
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| المؤلفون: | Kumar, Gourav, Karar, Partha, Singh, Arvind, Topkar, Anita, Patil, D S, Dusane, R O |
| المصدر: | In Thin Solid Films 28 February 2021 720 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 00406090 |
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| DOI: | 10.1016/j.tsf.2021.138521 |