دورية أكاديمية
Utilizing H2S to sulfurize transition metal and oxide barriers for suppressing resistivity scaling of ruthenium metallization
| العنوان: | Utilizing H2S to sulfurize transition metal and oxide barriers for suppressing resistivity scaling of ruthenium metallization |
|---|---|
| المؤلفون: | Chen, Yu-Lin, Hsiao, Kai-Yuan, Jhan, Dun-Jie, Lu, Ming-Yen, Keng, Pei Yuin, Chiu, Kun-An, Lin, Yu-Wei, Chang, Shou-Yi |
| المصدر: | In Thin Solid Films 15 August 2024 802 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 00406090 |
|---|---|
| DOI: | 10.1016/j.tsf.2024.140452 |