دورية أكاديمية
Correlation between the OES plasma composition and the diamond film properties during microwave PA-CVD with nitrogen addition
| العنوان: | Correlation between the OES plasma composition and the diamond film properties during microwave PA-CVD with nitrogen addition |
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| المؤلفون: | Vandevelde, T *, Wu, T.D, Quaeyhaegens, C, Vlekken, J, D’Olieslaeger, M, Stals, L |
| المصدر: | In Thin Solid Films 1999 340(1):159-163 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 00406090 |
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| DOI: | 10.1016/S0040-6090(98)01410-2 |