دورية أكاديمية
Texture change of TiN films due to anisotropic incorporation of oxygen
| العنوان: | Texture change of TiN films due to anisotropic incorporation of oxygen |
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| المؤلفون: | Biro, D., Hasaneen, M.F., Székely, L., Menyhárd, M., Gurbán, S., Pekker, P., Dódony, I., Barna, P.B. |
| المصدر: | In Vacuum May 2014 103:78-86 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 0042207X |
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| DOI: | 10.1016/j.vacuum.2013.12.013 |