دورية أكاديمية
Controlled autocrystallization in magnetron co-sputtered Si–Al films
| العنوان: | Controlled autocrystallization in magnetron co-sputtered Si–Al films |
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| المؤلفون: | Serdobintsev, A.A., Galushka, V.V., Volkovoynova, L.D., Kozhevnikov, I.O., Prikhozhdenko, E.S., Artyukhov, D.I., Gorshkov, N.V., Pavlov, A.M., Starodubov, A.V. |
| المصدر: | In Vacuum September 2022 203 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 0042207X |
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| DOI: | 10.1016/j.vacuum.2022.111304 |