دورية أكاديمية
Experimental and numerical study of MEMS electrothermal actuators: Comparing dynamic behavior and heat transfer process in vacuum and non-vacuum environments
| العنوان: | Experimental and numerical study of MEMS electrothermal actuators: Comparing dynamic behavior and heat transfer process in vacuum and non-vacuum environments |
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| المؤلفون: | Kong, Xiaoyu, Cao, Yun, Zhu, Hengbo, Wang, He, Lu, Junlin, Xu, Xiaobin, Nie, Weirong, Xi, Zhanwen |
| المصدر: | In Vacuum September 2024 227 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 0042207X |
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| DOI: | 10.1016/j.vacuum.2024.113409 |