دورية أكاديمية
Thermal desorption study on possible hydrogen sources and diffusion barriers in CMOS technology
| العنوان: | Thermal desorption study on possible hydrogen sources and diffusion barriers in CMOS technology |
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| المؤلفون: | Remondina, Jacopo, Portavoce, Alain, Bertoglio, Maxime, Roland, Guillaume, Lorut, Frédéric, Le Friec, Yannick, Benoit, Daniel, Putero, Magali |
| المصدر: | In Materials Letters 15 April 2023 337 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 0167577X |
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| DOI: | 10.1016/j.matlet.2023.133916 |