دورية أكاديمية
Challenge of ashing and cleaning on SiOC-H dielectric: characterization and main issues
| العنوان: | Challenge of ashing and cleaning on SiOC-H dielectric: characterization and main issues |
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| المؤلفون: | Louveau, O. ∗, Louis, D., Assous, M., Blanc, R., Brun, P., Lamy, S., Lajoinie, E. |
| المصدر: | In Microelectronic Engineering 2002 61:867-874 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 01679317 |
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| DOI: | 10.1016/S0167-9317(02)00486-0 |