دورية أكاديمية
Effect of moisture adsorption on the properties of porous-silica ultralow-k films
| العنوان: | Effect of moisture adsorption on the properties of porous-silica ultralow-k films |
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| المؤلفون: | Uchida, Y., Hishiya, S., Fujii, N., Kohmura, K., Nakayama, T., Tanaka, H., Kikkawa, T. |
| المصدر: | In Microelectronic Engineering 2006 83(11):2126-2129 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 01679317 |
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| DOI: | 10.1016/j.mee.2006.09.018 |