دورية أكاديمية
Stamp deformation and its influence on residual layer homogeneity in thermal nanoimprint lithography
| العنوان: | Stamp deformation and its influence on residual layer homogeneity in thermal nanoimprint lithography |
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| المؤلفون: | Merino, S., Retolaza, A., Schift, H., Trabadelo, V. |
| المصدر: | In Microelectronic Engineering May-June 2008 85(5-6):877-880 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 01679317 |
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| DOI: | 10.1016/j.mee.2008.01.045 |