دورية أكاديمية
Ge integration on Si via rare earth oxide buffers: From MBE to CVD (Invited Paper)
| العنوان: | Ge integration on Si via rare earth oxide buffers: From MBE to CVD (Invited Paper) |
|---|---|
| المؤلفون: | Schroeder, T., Giussani, A., Muessig, H.-J., Weidner, G., Costina, I., Wenger, Ch., Lukosius, M., Storck, P., Zaumseil, P. |
| المصدر: | In Microelectronic Engineering 2009 86(7):1615-1620 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 01679317 |
|---|---|
| DOI: | 10.1016/j.mee.2009.03.108 |