دورية أكاديمية
Fabrication of low-stress low-stiffness leveraged cantilever beam for bistable mechanism
| العنوان: | Fabrication of low-stress low-stiffness leveraged cantilever beam for bistable mechanism |
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| المؤلفون: | Wu, Y.B., Ding, G.F., Wang, J., Zhang, C.C., Wang, H. |
| المصدر: | In Microelectronic Engineering 2010 87(11):2035-2041 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 01679317 |
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| DOI: | 10.1016/j.mee.2010.01.016 |