دورية أكاديمية
Optical characterization of anatase TiO 2 films patterned by direct ultraviolet-assisted nanoimprint lithography
| العنوان: | Optical characterization of anatase TiO 2 films patterned by direct ultraviolet-assisted nanoimprint lithography |
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| المؤلفون: | Park, Hyeong-Ho, Zhang, Xin, Lee, Soon-Won, Jeong, Dong-Joo, Lee, Sang-Moo, Kim, Ki-don, Choi, Dae-Geun, Choi, Jun-Hyuk, Lee, Jihye, Lee, Eung-Sug, Kang, Ho Kwan, Park, Hyung-Ho, Hill, Ross H., Jeong, Jun-Ho |
| المصدر: | In Microelectronic Engineering 2011 88(6):923-928 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 01679317 |
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| DOI: | 10.1016/j.mee.2010.12.018 |