دورية أكاديمية
Optimization of laser anneal conditions for implanted shallow p/n-junctions
| العنوان: | Optimization of laser anneal conditions for implanted shallow p/n-junctions |
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| المؤلفون: | Soncini, V., Mica, I., Grasso, S., Polignano, M.L., Sansone, M.A., Margutti, G., Muzi, L. |
| المصدر: | In Microelectronic Engineering 1 August 2014 125:51-57 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 01679317 |
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| DOI: | 10.1016/j.mee.2014.01.010 |