دورية أكاديمية
Photo-curable resists for inkjet dispensing applied in large area and high throughput roll-to-roll nanoimprint processes
| العنوان: | Photo-curable resists for inkjet dispensing applied in large area and high throughput roll-to-roll nanoimprint processes |
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| المؤلفون: | Thesen, M.W., Ruttloff, S., Limberg, R.P.F., Vogler, M., Nees, D., Grützner, G. |
| المصدر: | In Microelectronic Engineering 1 July 2014 123:121-125 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 01679317 |
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| DOI: | 10.1016/j.mee.2014.06.010 |