دورية أكاديمية
Ultrathin homogeneous Ni(Al) germanosilicide layer formation on strained SiGe with Al/Ni multi-layers
| العنوان: | Ultrathin homogeneous Ni(Al) germanosilicide layer formation on strained SiGe with Al/Ni multi-layers |
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| المؤلفون: | Liu, Linjie, Jin, Lei, Knoll, Lars, Wirths, Stephan, Buca, Dan, Mussler, Gregor, Holländer, Bernhard, Xu, Dawei, Di, Zeng Feng, Zhang, Miao, Mantl, Siegfried, Zhao, Qing-Tai |
| المصدر: | In Microelectronic Engineering 2 April 2015 137:88-91 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 01679317 |
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| DOI: | 10.1016/j.mee.2014.11.022 |