دورية أكاديمية
Homogeneous NiSi1−xGex layer formation on strained SiGe with ultrathin Ni layers
العنوان: | Homogeneous NiSi1−xGex layer formation on strained SiGe with ultrathin Ni layers |
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المؤلفون: | Liu, Linjie, Knoll, Lars, Wirths, Stephan, Xu, Dawei, Mussler, Gregor, Breuer, Uwe, Holländer, Bernhard, Di, Zengfeng, Zhang, Miao, Mantl, Siegfried, Zhao, Qing-Tai |
المصدر: | In Microelectronic Engineering 1 May 2015 139:26-30 |
قاعدة البيانات: | ScienceDirect |
تدمد: | 01679317 |
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DOI: | 10.1016/j.mee.2015.04.083 |